On the doping mechanism of boron-doped hydrogenated amorphous silicon deposited by rf-co-sputtering

  1. De Lima Jr., M.M.
  2. Marques, F.C.
Aldizkaria:
Journal of Non-Crystalline Solids

ISSN: 0022-3093

Argitalpen urtea: 2002

Alea: 299-302

Zenbakia: PART 1

Orrialdeak: 605-609

Mota: Biltzar ekarpena

DOI: 10.1016/S0022-3093(01)01205-4 GOOGLE SCHOLAR