Nanoporous Metal-Organic Framework Thin Films Prepared Directly from Gaseous Precursors by Atomic and Molecular Layer Deposition: Implications for Microelectronics

  1. Multia, J.
  2. Kravchenko, D.E.
  3. Rubio-Giménez, V.
  4. Philip, A.
  5. Ameloot, R.
  6. Karppinen, M.
Revue:
ACS Applied Nano Materials

ISSN: 2574-0970

Année de publication: 2023

Volumen: 6

Número: 2

Pages: 827-831

Type: Article

DOI: 10.1021/ACSANM.2C04934 GOOGLE SCHOLAR lock_openAccès ouvert editor
La source de données: Scopus