Nanoporous Metal-Organic Framework Thin Films Prepared Directly from Gaseous Precursors by Atomic and Molecular Layer Deposition: Implications for Microelectronics

  1. Multia, J.
  2. Kravchenko, D.E.
  3. Rubio-Giménez, V.
  4. Philip, A.
  5. Ameloot, R.
  6. Karppinen, M.
Aldizkaria:
ACS Applied Nano Materials

ISSN: 2574-0970

Argitalpen urtea: 2023

Alea: 6

Zenbakia: 2

Orrialdeak: 827-831

Mota: Artikulua

DOI: 10.1021/ACSANM.2C04934 GOOGLE SCHOLAR lock_openSarbide irekia editor
Datuen iturria: Scopus