Nanoporous Metal-Organic Framework Thin Films Prepared Directly from Gaseous Precursors by Atomic and Molecular Layer Deposition: Implications for Microelectronics

1. Multia, J.
2. Kravchenko, D.E.
3. Rubio-Giménez, V.
4. Philip, A.
5. Ameloot, R.
6. Karppinen, M.

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DOI: 10.1021/ACSANM.2C04934 GOOGLE SCHOLAR lock_openOpen access editor

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