Real-time in situ monitoring of wet thermal oxidation for precise confinement in VCSELs

  1. Almuneau, G.
  2. Bossuyt, R.
  3. Collière, P.
  4. Bouscayrol, L.
  5. Condé, M.
  6. Suarez, I.
  7. Bardinal, V.
  8. Fontaine, C.
Revue:
Semiconductor Science and Technology

ISSN: 0268-1242,  1361-6641

Année de publication: 2008

Volumen: 23

Número: 10

Type: Article

DOI: 10.1088/0268-1242/23/10/105021 GOOGLE SCHOLAR
La source de données: Scopus