Real-time in situ monitoring of wet thermal oxidation for precise confinement in VCSELs

  1. Almuneau, G.
  2. Bossuyt, R.
  3. Collière, P.
  4. Bouscayrol, L.
  5. Condé, M.
  6. Suarez, I.
  7. Bardinal, V.
  8. Fontaine, C.
Journal:
Semiconductor Science and Technology

ISSN: 0268-1242,  1361-6641

Year of publication: 2008

Volume: 23

Issue: 10

Type: Article

DOI: 10.1088/0268-1242/23/10/105021 GOOGLE SCHOLAR
Data source: Scopus