Real-time in situ monitoring of wet thermal oxidation for precise confinement in VCSELs

  1. Almuneau, G.
  2. Bossuyt, R.
  3. Collière, P.
  4. Bouscayrol, L.
  5. Condé, M.
  6. Suarez, I.
  7. Bardinal, V.
  8. Fontaine, C.
Aldizkaria:
Semiconductor Science and Technology

ISSN: 0268-1242,  1361-6641

Argitalpen urtea: 2008

Alea: 23

Zenbakia: 10

Mota: Artikulua

DOI: 10.1088/0268-1242/23/10/105021 GOOGLE SCHOLAR
Datuen iturria: Scopus