High-purity cobalt nanostructures grown by focused-electron-beam-induced deposition at low current

  1. Córdoba, R.
  2. Sesé, J.
  3. De Teresa, J.M.
  4. Ibarra, M.R.
Revue:
Microelectronic Engineering

ISSN: 0167-9317

Année de publication: 2010

Volumen: 87

Número: 5-8

Pages: 1550-1553

Type: Article

DOI: 10.1016/J.MEE.2009.11.027 GOOGLE SCHOLAR
La source de données: Scopus