High-purity cobalt nanostructures grown by focused-electron-beam-induced deposition at low current

  1. Córdoba, R.
  2. Sesé, J.
  3. De Teresa, J.M.
  4. Ibarra, M.R.
Journal:
Microelectronic Engineering

ISSN: 0167-9317

Year of publication: 2010

Volume: 87

Issue: 5-8

Pages: 1550-1553

Type: Article

DOI: 10.1016/J.MEE.2009.11.027 GOOGLE SCHOLAR
Data source: Scopus