High-purity cobalt nanostructures grown by focused-electron-beam-induced deposition at low current

  1. Córdoba, R.
  2. Sesé, J.
  3. De Teresa, J.M.
  4. Ibarra, M.R.
Aldizkaria:
Microelectronic Engineering

ISSN: 0167-9317

Argitalpen urtea: 2010

Alea: 87

Zenbakia: 5-8

Orrialdeak: 1550-1553

Mota: Artikulua

DOI: 10.1016/J.MEE.2009.11.027 GOOGLE SCHOLAR