Focused electron beam induced etching of titanium with XeF2
- Schoenaker, F.J.
- Córdoba, R.
- Fernndez-Pacheco, R.
- Magén, C.
- Stéphan, O.
- Zuriaga-Monroy, C.
- Ibarra, M.R.
- De Teresa, J.M.
ISSN: 0957-4484, 1361-6528
Year of publication: 2011
Volume: 22
Issue: 26
Type: Article