Comparison between focused electron/ion beam-induced deposition at room temperature and under cryogenic conditions

  1. De Teresa, J.M.
  2. Orús, P.
  3. Córdoba, R.
  4. Philipp, P.
Zeitschrift:
Micromachines

ISSN: 2072-666X

Datum der Publikation: 2019

Ausgabe: 10

Nummer: 12

Art: Rezension

DOI: 10.3390/MI10120799 GOOGLE SCHOLAR lock_openOpen Access editor
Datenquelle: Scopus