Au-pva nanocomposite negative resist for one-step three-dimensional e-beam lithography
- Marqués-Hueso, J.
- Abargues, R.
- Canet-Ferrer, J.
- Agouram, S.
- Valdés, J.L.
- Martínez-Pastor, J.P.
ISSN: 0743-7463, 1520-5827
Année de publication: 2010
Volumen: 26
Número: 4
Pages: 2825-2830
Type: Article