Au-pva nanocomposite negative resist for one-step three-dimensional e-beam lithography

  1. Marqués-Hueso, J.
  2. Abargues, R.
  3. Canet-Ferrer, J.
  4. Agouram, S.
  5. Valdés, J.L.
  6. Martínez-Pastor, J.P.
Journal:
Langmuir

ISSN: 0743-7463,  1520-5827

Year of publication: 2010

Volume: 26

Issue: 4

Pages: 2825-2830

Type: Article

DOI: 10.1021/LA902915N GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus