Hard a-C:H films deposited at high deposition rates

  1. Marques, F.C.
  2. Lacerda, R.G.
  3. De Lima Jr., M.M.
  4. Vilcarromero, J.
Journal:
Thin Solid Films

ISSN: 0040-6090

Year of publication: 1999

Volume: 343-344

Issue: 1-2

Pages: 222-225

Type: Article

DOI: 10.1016/S0040-6090(98)01630-7 GOOGLE SCHOLAR
Data source: Scopus