Influence of krypton atoms on the structure of hydrogenated amorphous carbon deposited by plasma enhanced chemical vapor deposition

  1. Oliveira Jr., M.H.
  2. Viana, G.A.
  3. De Lima Jr., M.M.
  4. Cros, A.
  5. Cantarero, A.
  6. Marques, F.C.
Revista:
Journal of Applied Physics

ISSN: 0021-8979

Ano de publicación: 2010

Volume: 108

Número: 12

Tipo: Artigo

DOI: 10.1063/1.3526000 GOOGLE SCHOLAR