Influence of krypton atoms on the structure of hydrogenated amorphous carbon deposited by plasma enhanced chemical vapor deposition

  1. Oliveira Jr., M.H.
  2. Viana, G.A.
  3. De Lima Jr., M.M.
  4. Cros, A.
  5. Cantarero, A.
  6. Marques, F.C.
Revista:
Journal of Applied Physics

ISSN: 0021-8979

Any de publicació: 2010

Volum: 108

Número: 12

Tipus: Article

DOI: 10.1063/1.3526000 GOOGLE SCHOLAR