Fabrication of cobalt trifluoride (CoF3) phase from metallic cobalt by XeF2-assisted Focused Electron Beam Induced Processing

  1. De Teresa, J.M.
  2. Holuj, P.
  3. Córdoba, R.
  4. Fernández-Pacheco, R.
  5. Michalik, J.M.
Aldizkaria:
Microelectronic Engineering

ISSN: 0167-9317

Argitalpen urtea: 2014

Alea: 125

Orrialdeak: 78-82

Mota: Artikulua

DOI: 10.1016/J.MEE.2014.01.002 GOOGLE SCHOLAR

Garapen Iraunkorreko Helburuak

Datuen iturria: Scopus