Fabrication of cobalt trifluoride (CoF3) phase from metallic cobalt by XeF2-assisted Focused Electron Beam Induced Processing
- De Teresa, J.M.
- Holuj, P.
- Córdoba, R.
- Fernández-Pacheco, R.
- Michalik, J.M.
Zeitschrift:
Microelectronic Engineering
ISSN: 0167-9317
Datum der Publikation: 2014
Ausgabe: 125
Seiten: 78-82
Art: Artikel
