Creation of stable nanoconstrictions in metallic thin films via progressive narrowing by focused-ion-beam technique and in situ control of resistance

  1. Vincenc Oboňa, J.
  2. de Teresa, J.M.
  3. Córdoba, R.
  4. Fernández-Pacheco, A.
  5. Ibarra, M.R.
Journal:
Microelectronic Engineering

ISSN: 0167-9317

Year of publication: 2009

Volume: 86

Issue: 4-6

Pages: 639-641

Type: Article

DOI: 10.1016/J.MEE.2009.01.075 GOOGLE SCHOLAR
Data source: Scopus