Creation of stable nanoconstrictions in metallic thin films via progressive narrowing by focused-ion-beam technique and in situ control of resistance

  1. Vincenc Oboňa, J.
  2. de Teresa, J.M.
  3. Córdoba, R.
  4. Fernández-Pacheco, A.
  5. Ibarra, M.R.
Zeitschrift:
Microelectronic Engineering

ISSN: 0167-9317

Datum der Publikation: 2009

Ausgabe: 86

Nummer: 4-6

Seiten: 639-641

Art: Artikel

DOI: 10.1016/J.MEE.2009.01.075 GOOGLE SCHOLAR
Datenquelle: Scopus