Publicaciones en las que colabora con Pedro Acisclo Rodríguez Aumente (2)

2001

  1. Low-energy carbon and nitrogen ion implantation in silicon

    Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

2000

  1. Shallow buried SiNx layers

    Journal of Applied Physics, Vol. 87, Núm. 11, pp. 8201-8203