MARIA JESUS
HERNANDEZ LUCAS
TITULAR DE UNIVERSIDAD
Pedro Acisclo
Rodríguez Aumente
Publicaciones en las que colabora con Pedro Acisclo Rodríguez Aumente (2)
2001
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Low-energy carbon and nitrogen ion implantation in silicon
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
2000
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Shallow buried SiNx layers
Journal of Applied Physics, Vol. 87, Núm. 11, pp. 8201-8203