High-quality-factor tantalum oxide nanomechanical resonators by laser oxidation of TaSe2

1. Cartamil-Bueno, S.J.
2. Steeneken, P.G.
3. Tichelaar, F.D.
4. Navarro-Moratalla, E.
5. Venstra, W.J.
6. van Leeuwen, R.
7. Coronado, E.
8. van der Zant, H.S.J.
9. Steele, G.A.
10. Castellanos-Gomez, A.